Micro-Electro Mechanical Systems
Labels: Computers , Electronics , Free Download , Mechanical , Mechatronics , MEMS , Micro Electro Mechanical Systems , Paper Presentations , 0 comments
Abstract:This Presentation discusses :
• What is MEMS Technology ?
• Difference between MEMS Technology and IC manufacturing Technology.
• Three general methods of fabrication of MEMS devices :
1. Surface Micromachining
2. Bulk Micromachining
3. LIGA (Combination of Lithography, Plating, Molding)
It is available in the file which you can download from the link below.
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